Calculation of Al2O3 Contents in Al2O3-PTFE Composite Thick Films Fabricated by Using the Aerosol Deposition

Hyung-Jun Kim, Yoon-Hyun Kim, Song-Min Nam, Young Joon Yoon and Jong-Hee Kim

J. Korean Phys.Soc. 57,1086 [doi: 10.3938/jkps.57.1086 | PDF Download]

Low temperature fabrication of Al2O3-PTFE (Poly Tetra Fluoro Ethylene) composite thick films were attempted for the flexible integrated substrates by aerosol deposition method. For optimization of composite thick films, a novel calculation method of ceramic contents in the composites was attempted. Generally, thermogravimetry (TG) analysis is used to calculate ceramic contents in the ceramic-polymer composites. However, the TG analysis requires long measurement time in each analysis so we studied about the novel calculation method by simple dielectric measurement. We used Hashin-Shtrikman bounds to obtain numerical results of relationship between dielectric constant of composites and contents of Al2O3. A 3-D electrostatic simulation model similar to the deposited Al2O3-PTFE composite thick films was prepared and the simulation result was around the bottom limits of Hashin-Shtrikman bounds. As a result, we could calculate the Al2O3 contents in the composites with low error below 5 vol.% from convenient dielectric measurements and the Al2O3 contents were ranged from 51 vol.% to 54 vol.%.